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SEMI Requirements


Semiconductor Equipment and Materials International (SEMI) is a global trade association that represents the semiconductor and flat panel display equipment and materials industries. Founded in 1970 in the United States, SEMI has evolved into a worldwide organization committed to free trade and open markets. SEMI standards are industry based and have been adopted by most semiconductor manufacturers for their machinery.

SEMI S2-0703

Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
This safety guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment. This guideline applies to equipment used to manufacture, measure, assemble, and test semiconductor products.

SEMI S8-1000

Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
These guidelines provide ergonomic design principles and considerations for semiconductor manufacturing equipment. The purpose of these guidelines is to promote compatibility between the user and the equipment in the manufacturing environment.

SEMI E33-94

Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility
The purpose of this specification is to assure that semiconductor manufacturing facilities and the equipment used for manufacturing semiconductor devices will operate together reliably without failure caused by electromagnetic interference or electrostatic discharge. This goal is generally known as 'Electromagnetic Compatibility' or EMC. This specification applies to facilities and equipment constructed for the purpose of manufacturing semiconductor devices including all facilities alarm, safety, communications and control systems, processing equipment, metrology equipment, automation equipment, and information technology equipment.

SEMI F15-93

Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas and Gas Chromatography
The purpose of this test method is to provide a standardized method to test the ability of enclosures to contain gases and vapors and a standardized format to record and document test results. This test method applies to any enclosure that possesses a local exhaust (secondary ventilation) system.

Other Guidelines:

SEMI E6 -- Facilities Interface Specifications Guideline and Format
SEMI F5 -- Guide for Gaseous Effluent Handling
SEMI F14 -- Guide for the Design of Gas Source Equipment Enclosures
SEMI F15 -- Test Method for Enclosures Using Sulfur Hexafluoride Tracer Gas and Gas Chromatography
SEMI S1 -- Safety Guideline for Visual Hazard Alerts
SEMI S3 -- Safety Guideline for Heated Chemical Baths
SEMI S6 -- Safety Guideline for Ventilation
SEMI S7 -- Safety Guidelines for Environmental, Safety, and Health (ESH) Evaluation of Semiconductor Manufacturing Equipment
SEMI S8 -- Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S9 -- Electrical Test Methods for Semiconductor Manufacturing Equipment
SEMI S10 -- Safety Guideline for Risk Assessment
SEMI S12 -- Guidelines for Equipment Decontamination
SEMI S13 -- Safety Guidelines for Operation and Maintenance Manuals Used with Semiconductor Manufacturing Equipment

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